In the field of micro/nano micromanipulator technology, flexure-based microgripper and positioning mechanism based on piezoelectric transducer (PZT) driven with high positioning precision and large workspace are really desirable for the realization of high-performance micro/nano scale operation, micro electromechanical system (MEMS), biomedicine, atomic force microscope (AFM) scanner, microassembly, and biological cell automatic micro-injection. In these applications, piezo-actuated compliant mechanisms have been widely applied to ultra high accuracy operation because of their advantages of no friction, no backlash, vacuum compatibility, no need assembling, and easy to be fabricated. In order to meet this requirement, several novel large-stroke compliant micro-grippers and positioning mechanisms are developed and presented in this book.

Chapter 1 Introduction
1.1 Concept
1.2 Basic conception of flexure hinge
1.3 Research lever and status
1.4 Research method, step and contribution
1.5 Study contents and objectives
Chapter 2 Compliant mechanism design
2.1 Design case one: a 2-DOF micro-gripper
2.2 Design case two: a compactness micro-gripper
2.3 Design case three: a dual-axis micro-gripper
2.4 Design case four: 2-DOF precision positioning platform
2.5 Design case five : 3-DOF micro/nano position platform
2.6 Summary
Chapter 3 Research of modeling method
3.1 Analysis case one:2-DOF micro-gripper mechanism
3.2 Analysis case two : a compactness micro-gripper
3.3 Analysis case three: dual-axis micro-gripper
3.4 Analysis case four: 2-DOF micro/nano position stage
3.5 Analysis case five: 3-DOF micro/nano position stage
3.6 Summary
Chapter 4 Optimization and simulation of finite element analysis
4.1 Optimization case one: 2-DOF micro-gripper mechanism
4.2 Optimization case two: a compactness micro-gripper
4.3 Optimization case three: dual-axis micro-gripper
4.4 Optimization case four: 2-DOF micro/nano position stage
4.5 Optimization case five: 3-DOF micro/nano position stage
4.6 Summary
Chapter 5 Study of hysteresis model and compensation control method
5.1 Hysteresis compensation method one
5.2 Hysteresis compensation method two
5.3 Summary
Chapter 6 Study of motion control method
6.1 Study case one: adaptive backstepping slide mode control method for compactness micro-gripper
6.2 Study case two: position/force control for dual-axis micro-gripper
6.3 Study case three: robust control design
6.4 Study case four: backstepping dynamic surface control method
6.5 Summary
Chapter 7 Conclusions and perspectives
7.1 Conclusions
7.2 Perspective for future works
References